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HSM VINA develop and supply various equipment and solution required for the production process in the LCD, OLED industries. ESC(electrostatic chuck) is one of representative products. Electrostatic chuck is a device for generating an attracting force between an electrode and an object at a voltage applied to the electrode. It is used in a variety of semiconductor and display processes to hold the wafer or display during processing.

Especially in LCD, OLED industries, our 'Low Topology' PI-ESC products are very effective to adjust. Our products are (1)  Adsorbing various objects such as：metal conductor, semiconductor, display, insulator (glass), and porous materials. (2) Working well in vacuum environment. (3) No electrostatic side-effect : No affect on the backside of an object sucj as TFT circuit, because electric field cannot reach it. (4) Zero effect on object by using adsorption : uniform force is applied on the surface causing no indentation, scratch or any other damage.

The company is committed to research and development of hybrid ESC like Coated ESC, Tempered ESC, Robust ESC, Transparent ESC, etc for longer life time and higher chucking force.